Cleanroom technology : fundamentals of design, testing and operation / W. Whyte. fundamentals of design, testing and operation /
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Main Author: | |
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Format: | Book |
Language: | English |
Published: |
Chichester ; New York :
Wiley,
c2001.
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Subjects: | |
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Physical Description: | xiv, 309 p. : ill. ; 24 cm. |
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Bibliography: | Includes index |
ISBN: | 0471868426 |