APA (7th ed.) Citation

Hsu, T. (2002). MEMS and microsystems : design and manufacture / Tai-Ran Hsu: Design and manufacture. McGraw-Hill.

Chicago Style (17th ed.) Citation

Hsu, Tai-Ran. MEMS and Microsystems : Design and Manufacture / Tai-Ran Hsu: Design and Manufacture. Boston: McGraw-Hill, 2002.

MLA (9th ed.) Citation

Hsu, Tai-Ran. MEMS and Microsystems : Design and Manufacture / Tai-Ran Hsu: Design and Manufacture. McGraw-Hill, 2002.

Warning: These citations may not always be 100% accurate.