APA (7th ed.) Citation

Steinbrüchel, C., & Chin, B. (2001). Copper interconnect technology / Christoph Steinbrüche, Barry Chin. SPIE Optical Engineering Press.

Chicago Style (17th ed.) Citation

Steinbrüchel, Christoph, and Barry Chin. Copper Interconnect Technology / Christoph Steinbrüche, Barry Chin. Bellingham, WA: SPIE Optical Engineering Press, 2001.

MLA (9th ed.) Citation

Steinbrüchel, Christoph, and Barry Chin. Copper Interconnect Technology / Christoph Steinbrüche, Barry Chin. SPIE Optical Engineering Press, 2001.

Warning: These citations may not always be 100% accurate.