Library Catalogue Plus

APA (7th ed.) Citation

Helbert, J. N. (2000). Handbook of VLSI microlithography : principles, technology, and applications / [edited] by John Helbert: Principles, technology, and applications (2nd ed.). Noyes Publications/William Andrew Pub.

Chicago Style (17th ed.) Citation

Helbert, John N. Handbook of VLSI Microlithography : Principles, Technology, and Applications / [edited] by John Helbert: Principles, Technology, and Applications. 2nd ed. Norwich, NY: Noyes Publications/William Andrew Pub, 2000.

MLA (9th ed.) Citation

Helbert, John N. Handbook of VLSI Microlithography : Principles, Technology, and Applications / [edited] by John Helbert: Principles, Technology, and Applications. 2nd ed. Noyes Publications/William Andrew Pub, 2000.