Society of Photo-optical Instrumentation Engineers & Janson, S. W. (2003). MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003 San Jose, California, USA / Siegfried W. Janson chair/editor: 28-29 January 2003 San Jose, California, USA. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Siegfried W. Janson. MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II : 28-29 January 2003 San Jose, California, USA / Siegfried W. Janson Chair/editor: 28-29 January 2003 San Jose, California, USA. Bellingham, Wash.: SPIE, 2003.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Siegfried W. Janson. MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II : 28-29 January 2003 San Jose, California, USA / Siegfried W. Janson Chair/editor: 28-29 January 2003 San Jose, California, USA. SPIE, 2003.