Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA / Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company ... [et al.].
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| Corporate Authors: | , |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
c2002.
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| Series: | SPIE proceedings series ;
v. 4780 |
| Subjects: | |
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