Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA / Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company ... [et al.]. 9 July, 2002, Seattle, Washington, USA /

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Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Boeing Company
Other Authors: Gu, Zu-Han, Maradudin, A. A.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, c2002.
Series:SPIE proceedings series ; v. 4780
Subjects:
Surface roughness > Measurement > Congresses
Diffractive scattering > Congresses
Optical measurements > Congresses
Scattering (Physics) > Congresses
Metrology > Congresses
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Description
Physical Description:vii, 186 p. : ill. ; 28 cm.
Bibliography:Includes bibliographic references and author index
ISBN:0819445479

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