Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA / Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company ... [et al.]. 9 July, 2002, Seattle, Washington, USA /
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Format: | Book |
Language: | English |
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Bellingham, Washington :
SPIE,
c2002.
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Series: | SPIE proceedings series ;
v. 4780 |
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245 | 0 | 0 | |a Surface scattering and diffraction for advanced metrology II : |b 9 July, 2002, Seattle, Washington, USA / |c Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company ... [et al.]. |
260 | |a Bellingham, Washington : |b SPIE, |c c2002. | ||
300 | |a vii, 186 p. : |b ill. ; |c 28 cm. | ||
490 | 1 | |a SPIE proceedings series ; |v v. 4780 | |
504 | |a Includes bibliographic references and author index | ||
650 | 0 | 0 | |a Surface roughness |x Measurement |v Congresses |
650 | 0 | 0 | |a Diffractive scattering |v Congresses |
650 | 0 | 0 | |a Optical measurements |v Congresses |
650 | 0 | 0 | |a Scattering (Physics) |v Congresses |
650 | 0 | 0 | |a Metrology |v Congresses |
700 | 1 | |a Gu, Zu-Han | |
700 | 1 | |a Maradudin, A. A. | |
710 | 2 | |a Society of Photo-optical Instrumentation Engineers |9 2111 | |
710 | 2 | |a Boeing Company | |
787 | |a Proceedings (SPIE) |t No. 4780. Surface scattering and diffraction for advanced metrology II |w 000676404 | ||
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