Surface scattering and diffraction for advanced metrology II : 9 July, 2002, Seattle, Washington, USA / Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company ... [et al.]. 9 July, 2002, Seattle, Washington, USA /
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Corporate Authors: | Society of Photo-optical Instrumentation Engineers, Boeing Company |
---|---|
Other Authors: | Gu, Zu-Han, Maradudin, A. A. |
Format: | Book |
Language: | English |
Published: |
Bellingham, Washington :
SPIE,
c2002.
|
Series: | SPIE proceedings series ;
v. 4780 |
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