Johnstone, R. W., & Parameswaran, M. (2004). An introduction to surface-micromachining / by Robert W. Johnstone, M. Parameswaran. Kluwer Academic.
Chicago Style (17th ed.) CitationJohnstone, Robert W., and M. Parameswaran. An Introduction to Surface-micromachining / by Robert W. Johnstone, M. Parameswaran. Norwell, Mass. ; London: Kluwer Academic, 2004.
MLA (9th ed.) CitationJohnstone, Robert W., and M. Parameswaran. An Introduction to Surface-micromachining / by Robert W. Johnstone, M. Parameswaran. Kluwer Academic, 2004.
Warning: These citations may not always be 100% accurate.