Kockmann, N. (2006). Micro process engineering : fundamentals, devices, fabrication, and applications / edited by Norbert Kockmann: Fundamentals, devices, fabrication, and applications. Wiley-VCH distributor ; John Wiley.
Chicago Style (17th ed.) CitationKockmann, Norbert. Micro Process Engineering : Fundamentals, Devices, Fabrication, and Applications / Edited by Norbert Kockmann: Fundamentals, Devices, Fabrication, and Applications. Weinheim : Chichester: Wiley-VCH distributor ; John Wiley, 2006.
MLA (9th ed.) CitationKockmann, Norbert. Micro Process Engineering : Fundamentals, Devices, Fabrication, and Applications / Edited by Norbert Kockmann: Fundamentals, Devices, Fabrication, and Applications. Wiley-VCH distributor ; John Wiley, 2006.
Warning: These citations may not always be 100% accurate.