APA (7th ed.) Citation

May, G. S., & Spanos, C. J. (2006). Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. IEEE ; Wiley-Interscience.

Chicago Style (17th ed.) Citation

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control / Gary S. May, Costas J. Spanos. [Piscataway] : Hoboken, N.J.: IEEE ; Wiley-Interscience, 2006.

MLA (9th ed.) Citation

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control / Gary S. May, Costas J. Spanos. IEEE ; Wiley-Interscience, 2006.

Warning: These citations may not always be 100% accurate.