APA (7th ed.) Citation

Osten, W. (2007). Optical inspection of microsystems / edited by Wolfgang Osten. CRC/Taylor & Francis.

Chicago Style (17th ed.) Citation

Osten, Wolfgang. Optical Inspection of Microsystems / Edited by Wolfgang Osten. Boca Raton, Fla.: CRC/Taylor & Francis, 2007.

MLA (9th ed.) Citation

Osten, Wolfgang. Optical Inspection of Microsystems / Edited by Wolfgang Osten. CRC/Taylor & Francis, 2007.

Warning: These citations may not always be 100% accurate.