APA (7th ed.) Citation

Doering, R., & Nishi, Y. (2007). Handbook of semiconductor manufacturing technology / edited by Robert Doering and Yoshio Nishi. CRC/Taylor & Francis.

Chicago Style (17th ed.) Citation

Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology / Edited by Robert Doering and Yoshio Nishi. Boca Raton: CRC/Taylor & Francis, 2007.

MLA (9th ed.) Citation

Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology / Edited by Robert Doering and Yoshio Nishi. CRC/Taylor & Francis, 2007.

Warning: These citations may not always be 100% accurate.