Powell, R. A., & Rossnagel, S. M. (1999). PVD for microelectronics sputter deposition applied to semiconductor manufacturing / Ronald A. Powell [and] Stephen M. Rossnagel: Sputter deposition applied to semiconductor manufacturing. Academic Press.
Chicago Style (17th ed.) CitationPowell, Ronald A., and Stephen M. Rossnagel. PVD for Microelectronics Sputter Deposition Applied to Semiconductor Manufacturing / Ronald A. Powell [and] Stephen M. Rossnagel: Sputter Deposition Applied to Semiconductor Manufacturing. San Diego, Calif. ; London: Academic Press, 1999.
MLA (9th ed.) CitationPowell, Ronald A., and Stephen M. Rossnagel. PVD for Microelectronics Sputter Deposition Applied to Semiconductor Manufacturing / Ronald A. Powell [and] Stephen M. Rossnagel: Sputter Deposition Applied to Semiconductor Manufacturing. Academic Press, 1999.