MEMS 2006 Istanbul 19th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Istanbul, Turkey, 22-26 January 2006 / sponsored by IEEE, Robotics & Automation Society ; in cooperation with TUBITAK.
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| Corporate Authors: | , , , |
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| Format: | eBook |
| Language: | English |
| Published: |
Piscataway, NJ :
IEEE,
c2006.
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| Subjects: | |
| Online Access: | http://ieeexplore.ieee.org/servlet/opac?punumber=10836 |
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