Library Catalogue Plus

APA (7th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International, & IEEE Xplore (Online service). (2006). 17th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 2006, May 22-24, 2006, Boston, MA: ASMC 2006, May 22-24, 2006, Boston, MA. Institute of Electrical and Electronics Engineers.

Chicago Style (17th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International, and IEEE Xplore (Online service). 17th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 2006, May 22-24, 2006, Boston, MA: ASMC 2006, May 22-24, 2006, Boston, MA. Piscataway, N.J.: Institute of Electrical and Electronics Engineers, 2006.

MLA (9th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass, et al. 17th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 2006, May 22-24, 2006, Boston, MA: ASMC 2006, May 22-24, 2006, Boston, MA. Institute of Electrical and Electronics Engineers, 2006.