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The Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators 27-28 April 2006, Savoy Place, London, UK / organised by the Institution of Engineering and Technology Measurement, Sensors, Instrumentation & NDT and Microsystems and Nanotechnology Networks. 27-28 April 2006, Savoy Place, London, UK /

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Bibliographic Details
Corporate Authors: Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators London, England, Institution of Engineering and Technology, Institution of Engineering and Technology. Measurement, Sensors, Instrumentation & NDT and Microsystems and Nanotechnology Networks, IEEE Xplore (Online service)
Format: eBook
Language:English
Published: London : Institution of Engineering and Technology, c2006.
Series:Conference publication (Institution of Electrical Engineers) ; no. 11367.
Subjects:
Online Access:http://ieeexplore.ieee.org/servlet/opac?punumber=11029
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