Transducers '07, Lyon & Eurosensors XXI the 14th International Conference on Solid-State Sensors, Actuators, and Microsystems : Cite I Centre des Congres, Lyon, France, June 10-14, 2007 : digest of technical papers / sponsored by CEA-Leti-Minatec ; technical co-sponsors, IEEE, IEEE Electron Devices Society, Elsevier. (IEEE, 2007)