International Symposium on Semiconductor Manufacturing San Clara, Calif, & IEEE Xplore (Online service). (2007). ISSM 2007 2007 International Symposium on Semiconductor Manufacturing : conference poceedings : October 15-17, 2007, Santa Clara Marriott, Santa Clara, California: 2007 International Symposium on Semiconductor Manufacturing : conference poceedings : October 15-17, 2007, Santa Clara Marriott, Santa Clara, California. Institute of Electrical and Electronics Engineers.
Chicago Style (17th ed.) CitationInternational Symposium on Semiconductor Manufacturing San Clara, Calif, and IEEE Xplore (Online service). ISSM 2007 2007 International Symposium on Semiconductor Manufacturing : Conference Poceedings : October 15-17, 2007, Santa Clara Marriott, Santa Clara, California: 2007 International Symposium on Semiconductor Manufacturing : Conference Poceedings : October 15-17, 2007, Santa Clara Marriott, Santa Clara, California. Piscataway, NJ: Institute of Electrical and Electronics Engineers, 2007.
MLA (9th ed.) CitationInternational Symposium on Semiconductor Manufacturing San Clara, Calif, and IEEE Xplore (Online service). ISSM 2007 2007 International Symposium on Semiconductor Manufacturing : Conference Poceedings : October 15-17, 2007, Santa Clara Marriott, Santa Clara, California: 2007 International Symposium on Semiconductor Manufacturing : Conference Poceedings : October 15-17, 2007, Santa Clara Marriott, Santa Clara, California. Institute of Electrical and Electronics Engineers, 2007.