May, G. S., & Spanos, C. J. (2006). Fundamentals of semiconductor manufacturing and process control Gary S. May, Costas J. Spanos. IEEE ; Wiley-Interscience.
Chicago Style (17th ed.) CitationMay, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control Gary S. May, Costas J. Spanos. [Piscataway, N.J.] : Hoboken, N.J.: IEEE ; Wiley-Interscience, 2006.
MLA (9th ed.) CitationMay, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control Gary S. May, Costas J. Spanos. IEEE ; Wiley-Interscience, 2006.
Warning: These citations may not always be 100% accurate.