APA (7th ed.) Citation

Depla, D., & Mahieu, S. (2008). Reactive sputter deposition / D. Depla, S. Mahieu, editors. Springer.

Chicago Style (17th ed.) Citation

Depla, Diederik, and S. Mahieu. Reactive Sputter Deposition / D. Depla, S. Mahieu, Editors. Berlin: Springer, 2008.

MLA (9th ed.) Citation

Depla, Diederik, and S. Mahieu. Reactive Sputter Deposition / D. Depla, S. Mahieu, Editors. Springer, 2008.

Warning: These citations may not always be 100% accurate.