APA (7th ed.) Citation

Madou, M. J. (2012). Fundamentals of microfabrication and nanotechnology. Marc J. Madou (3rd ed.). CRC.

Chicago Style (17th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology. Marc J. Madou. 3rd ed. Boca Raton, Fla. ; London: CRC, 2012.

MLA (9th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology. Marc J. Madou. 3rd ed. CRC, 2012.

Warning: These citations may not always be 100% accurate.