Symposium on Semiconductor Processing. San Jose, Calif, American Society for Testing and Materials, ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Semiconductor Equipment and Materials Institute, Stanford University. Integrated Circuits Laboratory, & Gupta, D. C. (1984). Semiconductor processing a symposium sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University IC Laboratory, San Jose, Ca. American Society for Testing and Materials.
Chicago Style (17th ed.) CitationSymposium on Semiconductor Processing. San Jose, Calif, American Society for Testing and Materials, ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Semiconductor Equipment and Materials Institute, Stanford University. Integrated Circuits Laboratory, and D. C. Gupta. Semiconductor Processing a Symposium Sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University IC Laboratory, San Jose, Ca. Philadelphia, Pa.: American Society for Testing and Materials, 1984.
MLA (9th ed.) CitationSymposium on Semiconductor Processing. San Jose, Calif, et al. Semiconductor Processing a Symposium Sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University IC Laboratory, San Jose, Ca. American Society for Testing and Materials, 1984.