Symposium on Silicon Processing San Jose, Calif, ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Stanford University, American Society for Testing and Materials, & Gupta, D. C. (1983). Silicon processing a symposium sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982, D. C. Gupta, Siliconix Incorporated, editor. American Society for Testing and Materials.
Chicago Style (17th ed.) CitationSymposium on Silicon Processing San Jose, Calif, ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Stanford University, American Society for Testing and Materials, and D. C. Gupta. Silicon Processing a Symposium Sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982, D. C. Gupta, Siliconix Incorporated, Editor. Philadelphia, Pa.: American Society for Testing and Materials, 1983.
MLA (9th ed.) CitationSymposium on Silicon Processing San Jose, Calif, et al. Silicon Processing a Symposium Sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982, D. C. Gupta, Siliconix Incorporated, Editor. American Society for Testing and Materials, 1983.