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High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy
Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro-and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surfac...
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| Main Authors: | , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/11522265.v1 |
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| _version_ | 1818167833017712640 |
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| author | Rong Su Matthew Thomas Mingyu Liu Jeremy Coupland Richard Leach |
| author_facet | Rong Su Matthew Thomas Mingyu Liu Jeremy Coupland Richard Leach |
| author_sort | Rong Su (2210740) |
| collection | Figshare |
| description | Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro-and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction. |
| format | Default Conference proceeding |
| id | rr-article-11522265 |
| institution | Loughborough University |
| publishDate | 2019 |
| record_format | Figshare |
| spelling | rr-article-115222652019-09-03T00:00:00Z High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy Rong Su (2210740) Matthew Thomas (3043569) Mingyu Liu (248120) Jeremy Coupland (1248465) Richard Leach (8265308) Coherence scanning interferometry Error correction Transfer function Metrology Surface topography Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro-and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction. 2019-09-03T00:00:00Z Text Conference contribution 2134/11522265.v1 https://figshare.com/articles/conference_contribution/High-accuracy_surface_measurement_through_modelling_of_the_surface_transfer_function_in_interference_microscopy/11522265 All Rights Reserved |
| spellingShingle | Coherence scanning interferometry Error correction Transfer function Metrology Surface topography Rong Su Matthew Thomas Mingyu Liu Jeremy Coupland Richard Leach High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy |
| title | High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy |
| title_full | High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy |
| title_fullStr | High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy |
| title_full_unstemmed | High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy |
| title_short | High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy |
| title_sort | high-accuracy surface measurement through modelling of the surface transfer function in interference microscopy |
| topic | Coherence scanning interferometry Error correction Transfer function Metrology Surface topography |
| url | https://hdl.handle.net/2134/11522265.v1 |