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High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy
Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro-and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surfac...
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| Main Authors: | , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/11522265.v1 |
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