Loading…
Tribological behavior of diamond-like carbon coatings with patterned structure deposited by the filtered cathodic vacuum arc
Patterned diamond-like carbon (DLC) coatings were deposited on a Si (100) substrate using the filtered cathodic vacuum arc technique. The effects of the patterning and of the coating thickness on tribological behavior of DLC coating were investigated using a ball-on-disk tribometer under dry and oil...
Saved in:
Main Authors: | , , , , , |
---|---|
Format: | Default Article |
Published: |
2019
|
Subjects: | |
Online Access: | https://hdl.handle.net/2134/12053634.v1 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|