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Tribological behavior of diamond-like carbon coatings with patterned structure deposited by the filtered cathodic vacuum arc

Patterned diamond-like carbon (DLC) coatings were deposited on a Si (100) substrate using the filtered cathodic vacuum arc technique. The effects of the patterning and of the coating thickness on tribological behavior of DLC coating were investigated using a ball-on-disk tribometer under dry and oil...

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Bibliographic Details
Main Authors: Yongqing Shen, Han Zhou, Haoqi Wang, Bin Liao, Xianying Wu, Xu Zhang
Format: Default Article
Published: 2019
Subjects:
Online Access:https://hdl.handle.net/2134/12053634.v1
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