Modeling of interference microscopy beyond the linear regime

© The Authors. Coherence scanning interferometry (CSI), a type of interference microscopy, has found broad applications in the advanced manufacturing industry, providing high-accuracy surface topography measurement. Enhancement of the metrological capability of CSI for complex surfaces, such as thos...

Full description

Saved in:
Bibliographic Details
Main Authors: Matthew Thomas, Rong Su, Nikolay Nikolaev, Jeremy Coupland, Richard Leach
Format: Default Article
Published: 2020
Subjects:
Artificial intelligence not elsewhere classified
interference microscopy
optical modeling
surface scattering
computational electromagnetic
boundary element method
Science & Technology
Physical Sciences
Optics
LATERAL RESOLUTION
LIGHT
CALIBRATION
SCATTERING
SURFACES
GRATINGS
Optical Physics
Electrical and Electronic Engineering
Artificial Intelligence and Image Processing
Online Access:https://hdl.handle.net/2134/14248931.v1
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

https://hdl.handle.net/2134/14248931.v1

Similar Items