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Controlling resonator nonlinearities and modes through geometry optimization

Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response...

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Bibliographic Details
Main Authors:	Amal Hajjaj, Nizar Jaber
Format:	Default Article
Published:	2021
Subjects:	Nanotechnology MEMS resonators nonlinearity tailoring geometry optimization
Online Access:	https://hdl.handle.net/2134/21696209.v1
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