Kwon, H., Huh, H., Seo, H., Han, S., Won, I., Sue, J., . . . Cha, S. (2022). TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process.
Chicago Style (17th ed.) CitationKwon, Hyoungcheol, et al. TCAD Augmented Generative Adversarial Network for Hot-spot Detection and Mask-layout Optimization in a Large Area HARC Etching Process. 2022.
MLA (9th ed.) CitationKwon, Hyoungcheol, et al. TCAD Augmented Generative Adversarial Network for Hot-spot Detection and Mask-layout Optimization in a Large Area HARC Etching Process. 2022.
Warning: These citations may not always be 100% accurate.