Asynchronous pulse-modulated plasma effect on the generation of abnormal high-energetic electrons for the suppression of charge-up induced tilting and cell density-dependent etching profile variation

The formation of high-energy electrons and ion fluxes induced by an abnormal electron heating mode in asynchronous pulse-modulated plasma was investigated using particle-in-cell simulation. We demonstrate that the abnormally high electron heating mode was induced only for a short time in the asynchr...

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Bibliographic Details
Main Authors: Hyoungcheol Kwon, Felipe Iza, Imhee Won, Minkyung Lee, Songhee Han, Raseong Park, Yongjin Kim, Dongyean Oh, Sung-Kye Park, Seonyong Cha
Format: Default Article
Published: 2023
Subjects:
Physical sciences
Classical physics
Fluids & Plasmas
Online Access:https://hdl.handle.net/2134/22226758.v1
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https://hdl.handle.net/2134/22226758.v1

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