Dynamics of a piezoelectric MEMS gas sensor based on coupled micromachined resonators

This work discusses the dynamics of MEMS structures; including a single cantilever, a single clamped-clamped beam, and a mechanically coupled cantilever and bridge resonator; actuated by Aluminum Nitride (AlN) layer, exploring the potential of coupled systems in gas sensing application. The pure AC...

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Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Fasil Dejene, Amal Hajjaj
Format: Default Conference proceeding
Published: 2024
Subjects:
MEMS
Nonlinear dynamics
AlN-Piezoelectric
Gas sensing
Weakly coupled resonators
Online Access:https://hdl.handle.net/2134/25226747.v1
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