Gas sensor based on nonlinear coupled AlN-piezoelectric micromachined resonators

This paper reports a novel Aluminium-Nitride (AlN)-based piezoelectric micromachined gas sensor relying on thermal energy dissipation (heating or cooling) of an electrically heated weakly coupled resonator. The coupled MEMS resonator, consisting of a bridge and cantilever resonators mechanically cou...

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Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Nizar Jaber, Amal Hajjaj
Format: Default Conference proceeding
Published: 2023
Subjects:
MEMS
Nonlinear dynamics
AlN-Piezoelectric
Gas sensing
Weakly coupled resonators
Online Access:https://hdl.handle.net/2134/25226750.v1
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