A MEMS triple sensing scheme based on nonlinear coupled micromachined resonators [Abstract]

In the past few decades, advances in micro-electromechanical systems (MEMS) have produced robust, accurate, and high-performance devices. Extensive research has been conducted to improve the selectivity and sensitivity of MEMS sensors by adjusting the device dimensions and adopting nonlinear feature...

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Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Amal Hajjaj
Format: Default Conference proceeding
Published: 2024
Subjects:
Acoustics
Micro-electromechanical systems (MEMS)
Multi-sensing
Nonlinear dynamics
Electrostatic actuation
Weakly coupled resonators
Online Access:https://hdl.handle.net/2134/25241761.v1
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https://hdl.handle.net/2134/25241761.v1

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