Multi-gas sensing design based on nonlinear coupled micromachined resonators [Extended abstract]

Micro-electromechanical (MEMS) gas sensors receive increasing interest thanks to the high demand for environmental monitoring, air quality measurement, chemical process control, and personal safety. Extensive research has been conducted to improve the selectivity and sensitivity of gas sensors. Howe...

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Bibliographic Details
Main Authors: Zhengliang Fang, Amal Hajjaj, Stephanos Theodossiades
Format: Default Conference proceeding
Published: 2024
Subjects:
Gas sensor
Multi sensing
MEMS
Mode
Localization
Online Access:https://hdl.handle.net/2134/25241776.v1
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https://hdl.handle.net/2134/25241776.v1

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