Extracting focus variation data from coherence scanning interferometric measurements

Coherence scanning interferometry (CSI), based on the principle of interference, can achieve sub-nanometer precision for height measurements. On the other hand, focus variation microscopy (FVM), combining the small depth of field of the objective, is a widely used surface topography measurement meth...

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Bibliographic Details
Main Authors: Jiayu Liu, Helia Hooshmand, Samanta Piano, Richard Leach, Jeremy Coupland, Mingjun Ren, Limin Zhu, Rong Su
Format: Default Article
Published: 2024
Subjects:
Engineering
Physical sciences
Technology
Industrial Engineering & Automation
Coherence scanning interferometry
Focus variation microscopy
Additive manufacturing
Surface metrology
Data fusion
Signal processing
Online Access:https://hdl.handle.net/2134/26039086.v1
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https://hdl.handle.net/2134/26039086.v1

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