The numerical modelling of focussed ion beam systems
The work in this thesis examines the numerical modelling of focussed ion beam systems, with applications ranging from the surface analysis of materials by SIMS to microfabrication by ion beam lithography. An efficient and accurate computer programme has been developed and tested on medium sized mach...
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| Format: | Default Thesis |
| Published: |
1987
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| Online Access: | https://hdl.handle.net/2134/28312 |
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