Calibration and adjustment of coherence scanning interferometry

Coherence scanning interferometry (CSI) is a non-contacting optical technique which is widely used for the measurement of surface topography. CSI combines the lateral resolution of a high power microscope with the axial resolution of an interferometer. As with any other metrology instrument, CSI is...

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Bibliographic Details
Main Author: Rahul Mandal
Format: Default Thesis
Published: 2015
Subjects:
Mechanical engineering not elsewhere classified
Coherence scanning interferometry
Surface topography
Three dimensional linear theory
Point spread function
Transfer function
Distortion compensation
Mechanical Engineering not elsewhere classified
Online Access:https://hdl.handle.net/2134/17357
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