Tilt scanning interferometry: a numerical simulation benchmark for 3D metrology

Tilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multicomponent displacement fields inside the volume of a sample. In this paper, we present a simulation model that allows for the evaluation of the speckle fields recorded in TSI when this technique...

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Bibliographic Details
Main Authors: Gustavo E. Galizzi, Pablo Ruiz, Guillermo H. Kaufmann
Format: Default Article
Published: 2009
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Mechanical engineering not elsewhere classified
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Mechanical Engineering not elsewhere classified
Mechanical Engineering
Online Access:https://hdl.handle.net/2134/16734
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https://hdl.handle.net/2134/16734

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