Electron and ion kinetics in a micro hollow cathode discharge

Electron and ion kinetics in a micro hollow cathode discharge are investigated by means of two-dimensional axisymmetric particle-in-cell Monte Carlo collision simulations. Argon discharges at 10 and 300 Torr are studied for various driving currents. Electron and ion energy probability functions (IEP...

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Bibliographic Details

Main Authors:	G.J. Kim, Felipe Iza, Jae Koo Lee
Format:	Default Article
Published:	2006
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/3222
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