Application of adhesives in MEMS and MOEMS assembly: a review

This paper presents a review of the recent literature on the use of adhesives in MEMS packaging applications. The aim of this review has been to establish the current applications of adhesives in MEMS and MOEMS assembly and to investigate the limitations and future requirements of these materials. T...

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Bibliographic Details

Main Authors:	Farhad Sarvar, David Hutt, David Whalley
Format:	Default Text
Published:	2002
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/3981
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