Tolerance on sphere radius for the calibration of the transfer function of coherence scanning interferometry

Although coherence scanning interferometry (CSI) commonly achieves a sub-nanometre noise level in surface topography measurement, the absolute accuracy is difficult to determine when measuring a surface that contains varying local slope angles and curvatures. Recent research has shown that it is pos...

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Bibliographic Details
Main Authors: Rong Su, Jeremy Coupland, Yang Wang, Richard K. Leach
Format: Default Conference proceeding
Published: 2017
Subjects:
Mechanical engineering not elsewhere classified
Transfer function
Calibration
Coherence scanning interferometry
Tolerance
Surface topography
Metrology
Mechanical Engineering not elsewhere classified
Online Access:https://hdl.handle.net/2134/26434
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