The assessment of residual flatness errors in focus variation areal measuring instruments

Optical instruments for areal surface topography measurement rely on high-precision lenses that guide the light from the object surface to the image plane. Lens aberrations may cause distortion of the transmitted image and consequently a residual flatness error in the measurement data. Previous work...

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Bibliographic Details

Main Authors:	Florine Hiersemenzel, Jagpal Singh, Jon Petzing, Richard K. Leach, F. Helmli, R. Danzl
Format:	Default Conference proceeding
Published:	2012
Subjects:	Mechanical engineering not elsewhere classified Focus variation Errors Flatness Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/11557
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