2500-Channel single-shot areal profilometer using hyperspectral interferometry with a pinhole array

Surface profilometry techniques such as coherent scanning interferometry or focus variation require long scan times and are thus vulnerable to environmental disturbance. Hyperspectral interferometry (HSI) overcomes the problem by recording all the spatial and spectral information necessary to recons...

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Bibliographic Details
Main Authors: Tobias Reichold, Pablo Ruiz, Jonathan M. Huntley
Format: Default Article
Published: 2019
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Online Access:https://hdl.handle.net/2134/38162
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