Search Results - "Microtechnology and MEMS"

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    Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink.

    Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink. by Elwenspoek, M. (Miko), 1948-

    Published 2001
    “…Microtechnology and MEMS…”
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