Search Results - Lee, Kye Jung~

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  1. 1
    Asynchronous pulse-modulated plasma effect on the generation of abnormal high-energetic electrons for the suppression of charge-up induced tilting and cell density-dependent etching profile variation

    Asynchronous pulse-modulated plasma effect on the generation of abnormal high-energetic electrons for the suppression of charge-up induced tilting and cell density-dependent etchin... by Hyoungcheol Kwon, Felipe Iza, Imhee Won, Minkyung Lee, Songhee Han, Raseong Park, Yongjin Kim, Dongyean Oh, Sung-Kye Park, Seonyong Cha

    Published 2023
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  2. 2
    TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process

    TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process by Hyoungcheol Kwon, Hyunsuk Huh, Hwiwon Seo, Songhee Han, Imhee Won, Jiwoong Sue, Dongyean Oh, Felipe Iza, Seungchul Lee, Sung Kye Park, Seonyong Cha

    Published 2022
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