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    TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process

    TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process by Hyoungcheol Kwon, Hyunsuk Huh, Hwiwon Seo, Songhee Han, Imhee Won, Jiwoong Sue, Dongyean Oh, Felipe Iza, Seungchul Lee, Sung Kye Park, Seonyong Cha

    Published 2022
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