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    Asynchronous pulse-modulated plasma effect on the generation of abnormal high-energetic electrons for the suppression of charge-up induced tilting and cell density-dependent etching profile variation

    Asynchronous pulse-modulated plasma effect on the generation of abnormal high-energetic electrons for the suppression of charge-up induced tilting and cell density-dependent etchin... by Hyoungcheol Kwon, Felipe Iza, Imhee Won, Minkyung Lee, Songhee Han, Raseong Park, Yongjin Kim, Dongyean Oh, Sung-Kye Park, Seonyong Cha

    Published 2023
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