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Extracting focus variation data from coherence scanning interferometric measurements
by
Jiayu Liu
,
Helia Hooshmand
,
Samanta Piano
,
Richard Leach
,
Jeremy Coupland
,
Mingjun
Ren
,
Limin Zhu
,
Rong Su
Published 2024
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Helia Hooshmand
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Jeremy Coupland
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Jiayu Liu
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Limin Zhu
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Mingjun Ren
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Richard Leach
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Rong Su
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