Effects of N/Si ratio on mechanical properties of amorphous silicon nitride coating

The utilization of silicon nitride coatings has been proposed as an effective method to enhance wear resistance and mitigate the release of metallic ions from biomedical implants. However, the relatively high dissolution rate of low-density coatings remains an obstacle to their implementation. Here,...

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Bibliographic Details
Published in:Materials Research Express 2023-11, Vol.10 (11), p.115403
Main Authors: Zhou, Huasi, Persson, Cecilia, Xia, Wei, Engqvist, Håkan
Format: Article
Language:English
Subjects:
Ammonia
Amorphous materials
Amorphous silicon
Bonding strength
Chemical vapor deposition
Coatings
friction and wear
Hardness
Hardness and elastic modulus
Low pressure
LPCVD
Mechanical properties
Modulus of elasticity
Nitrogen
Physical vapor deposition
Silicon nitride
silicon nitride coating
Surgical implants
Temperature
Tribology
Wear rate
Wear resistance
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